Bahrom EGAMBERDIEV, Amin MALLAEV and Shohruh SAYFULLOEV 2024. STUDY OF THE DISTRIBUTION PROFILE OF ION- IMPLANTED IN SILICON AND INFLUENCE THERMAL ANNEALING ON THE STRUCTYRE OF IRON SILICIDES. News of the NUUz. 3, 3.1 (Mar. 2024), 524-528. DOI:https://doi.org/10.69617/uzmu.v3i3.1.1947.