Bahrom EGAMBERDIEV, Amin MALLAEV, and Shohruh SAYFULLOEV. “STUDY OF THE DISTRIBUTION PROFILE OF ION- IMPLANTED IN SILICON AND INFLUENCE THERMAL ANNEALING ON THE STRUCTYRE OF IRON SILICIDES”. News of the NUUz, Vol. 3, no. 3.1, Mar. 2024, pp. 524-8, doi:10.69617/uzmu.v3i3.1.1947.